ISO INTERNATIONAL STANDARD 20341 First edition 2003-07-15 Surface chemical analysis Secondary- ion mass spectrometry Method for estimating depth resolution parameters with multiple delta-layer reference materials Analyse chimique des surfaces-Spectrometrie de masse des ions secondaires - Methode d'estimation des parametres de resolution en profondeur a I'aide de matériaux de référence multicouches minces Reference number ISO 20341:2003(E) @ ISO 2003 CopyrighenaionalrganizationforStandardization No reproduction or networking permitted without license from IHS Not for Resale ISO 20341:2003(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall not be 'edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. .In downloading this file, parties accept therein the responsibility of not infringing Adobe's licensing policy. The ISO Central Secretariat accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In the @ISO2003 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either Iso at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56· CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland @ISO 2003-All rights reserved No reproduction or networking permited without license from IHS Not for Resale ISO 20341:2003(E) Contents Page 1 Scope 2 Normative references 3 Symbols ... 4 Requirements for multiple delta-layer reference materials 1 5 Procedures.. 2 6 Test report, 3 Annex A (normative) Simpler options of estimating SiMS depth resolution parameters 4 Bibliography 5 CopyrightInternatinal Organizatin forstandardization'ghts reserved ili No reproduction or networking permitted without license from IHS Not for Resale ISO 20341:2003(E) Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies technical committees. Each member body interested in a subject for which a technical committee has been Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. International Standards are drafted in accordance with the rules given in the ISO/lEC Directives, Part 2. The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote. rights. IsO shall not be held responsible for identifying any or all such patent rights. ISO 20341 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee SC 6, Secondary ion mass spectrometry. @ ISO 2003 - All rights reserved copyrig Not fr Resale ISO 20341:2003(E) Introduction Depth resolution is one of the important parameters in SiMS depth profiling. However, sputter depth profiles in SiMS analysis are affected by many factors which may include ion-beam-induced mixing and segregation, primary-ion beam energy, glancing incidence angle, specimen rotation, specimen cooling to cryogenic temperature, etc., all of which cannot be easily adopted for daily SiMs analysis. In addition to this, the optimization of the analysis parameters may be quite different for each specimen. Moreover, different aspects of the depth resolution are also affected by instrumental factors such as the crater shape, ion beam homogeneity removal of the crater edge effec