ISO INTERNATIONAL STANDARD 18116 First edition 2005-08-15 Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis Analyse chimique des surfaces - Lignes directrices pour la préparation et le montage des échantillons destinés a I'analyse Reference number ISO 18116:2005(E) ISO @ ISO 2005 Copyright Intermnational Organization for Standardization Not for Resale ISO 18116:2005(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In the @ISO2005 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either Iso at the address below or ISO's memberbody in the country of the requester. ISO copyright office Case postale 56 · CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland Copyright Intemational organizationforstandardizatin @ ISO 2005 - All rights reserved No'reproduction or networking permited without license from IHS Not for Resale ISO 18116:2005(E) Contents Page 1 Scope 2 Normative references 3 Terms and definitions 4 Symbols and abbreviated terms ... 5 General requirements .... 6 Visual inspection of the specimen 2 Specimen considerations 2 7.1 History 2 7.2 Information sought . 2 7.3 Specimens previously examined by other analytical techniques . 2 8 Sources of specimen contamination 3 8.1 Tools, gloves, mounts and similar materials ... 3 8.2 Exposure to gases ... 3 8.3 Exposure to instrumental vacuum 3 8.4 Exposure to electrons, ions, and X-rays ... 3 8.5 Contamination of the analytical chamber 4 9 Specimen storage and transfer 4 9.1 Storage time ... 4 9.2 Storage containers 4 9.3 Temperature and humidity 4 9.4 Specimen transfer .. 5 10 Specimen mounting procedures 5 10.1 General procedures 5 10.2 Powders and particles 10.3 Wires, fibres and filaments .... 9 10.4 Pedestal mounting .. 6 10.5 Reduction of thermal damage during analysis 6 11 Methods for reducing specimen charging 6 11.1 General considerations .... 6 11.2 Conductive mask, grid, wrap or coating 6 11.3 Flood gun ... 7 11.4 Electron and ion beams 12 Specimen preparation techniques . 12.1 General considerations 1. 12.2 Mechanical separation . 12.3 Thinning versus removal 8 12.4 Removal of the substrate .... 8 12.5 Sectioning techniques 8 12.6 Growth of overlayers 9 tandardization'ghts reserved ili zationfor3 eproduction or networking pemited without license from IHS Not for Resale ISO 18116:2005(E) 12.7 Solvents ... 9 12.8 Chemical etching 10 12.9 lon sputtering .... 10 12.10Plasma etching 11 12.11 Heating 11 12.12 Ultraviolet radiation ....... 11 13 Fracturing, cleaving and scribing ... 12 13.1 Fracture 12 13.2 Cleaving . 12 13.3 Scribing 12 14 Special specimen-handling techniques 13 14.1 Prepumping of gassy specimens 13 14.2 Viscous liquids 13 14.3Solute residue . 13 Bibliography 14 ational Organization for Standardization @ ISO 2005 - All rights reserved ctrkiniwithoutlicenefrm Not for Resale ISO 18116:2005(E) Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies (IsO member bodies). The work of preparing International Standards is normally carried out through IsO non-governmental, in liaison with IsO, also take part in the work. IsO collaborates closely with the International International Standards are drafted in accordance with the rules given in the ISO/lEC Direc