BS ISO BRITISH STANDARD 17974:2002 Surface chemical analysis - High-resolution Auger electron spectrometers - Calibration of energy scales for elemental and chemical-state analysis Confirmed October 2010 ICS 71.040.40 BSi NOCOPYINGWITHOUTBSIPERMISSIONEXCEPTASPERMITTEDBYCOPYRIGHTLAW British Standards BSISO17974:2002 National foreword This British Standard reproduces verbatim ISO 17974:2002 and implements it asthe UKnational standard The UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis, which has the responsibility to: aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international publications referred to in this document may be found in the BSI Catalogue under the section entitled "International Standards Correspondence Index", or by using the "Search" facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not of itself confer immunity from legal obligations. This British Standard, having Summary of pages been prepared under the This document comprises a front cover, an inside front cover, the ISO title page direction of the Materials and Chemicals Sector Policy and pages ii to V, a blank page, pages 1 to 27 and a back cover. Strategy Committee, was The BSI copyright date displayed in this document indicates when the published under the authority document was last issued. of the Standards Policy and Strategy Committee on 29 November 2002 Amendments issued since publication Amd. No. Date Comments BSI29November2002 ISBN 0 580 40848 5 BS ISO 17974:2002 INTERNATIONAL ISO STANDARD 17974 First edition 2002-10-01 Surface chemical analysis High- resolution Auger electron spectrometers Calibration of energy scales for elemental and chemical-state analysis Analyse chimique des surfaces- Spectrometres d'électrons Auger a haute résolution- Etalonnage des échelles d'énergie pour I'analyse élémentaire et de I'état chimique Reference number ISO 17974:2002(E) BS ISO 17974:2002 ii BS IS0 17974:2002 Contents Page Foreword Introductior 1 Scope. 2 Normative reference 3 Terms and definitions. 4 Symbols and abbreviated terms 5 Outline of method 6 Procedure for calibrating the energy scale. 6.1 Obtaining reference samples ... 6.2 Mounting samples .... 6.3 Cleaning samples 6.4 Choosing spectrometer settings for energy calibration. 6.5 Operatingtheinstrument.. 6.6 Options for initial or subsequent calibration measurements 6.7 6.8 Calculatingpeakkineticenergyrepeatabilitystandarddeviation 6.9 Determining relevant reference kinetic energies... 6.10 Checking kinetic energy scale linearity.. 6.11 Procedureforregularcalibrationerrordeterminatior 6.12 Procedures for correction of the instrument kinetic energy scale ... 6.13 Next calibration.. 6.14 Establishing calibration intervals . Annex A (normative) Maximum number of points for a single application of Savitzky and Golay smoothing of peaks at 0,1 eV energy intervals.... Annex B (normative) Least squares determination of peak kinetic energy by a simple computational method.. ..20 Annex C (informative) Derivation of uncertainties. .23 Annex D (informative) Citation of uncertainties of measured kinetic energies, Bibliography. 27 ii BS ISO 17974:2002 Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (iSO committees.Eachmemberbodyinterestedinasubjectforwhichatechnicalcommitteehasbeenestablishedhas Commission