ISO INTERNATIONAL STANDARD 13695 First edition 2004-06-01 Optics and photonics Lasers and laser-related equipment Test methods for the spectral characteristics of lasers Optique et photonique Lasers et équipement associé aux lasers - Methodes d'essai des caracteristiques spectrales des lasers Reference number ISO 13695:2004(E) ISO Copyright International Organization for Standardization ISO2004 itted without license from IHS Not for Resale ISO13695:2004(E) PDF disclaimer This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In accepts no liability in this area. Adobe is a trademark of Adobe Systems Incorporated. Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by IsO member bodies. In the unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below @ISO2004 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, IsO's member body in the country of the requester. ISO copyright office Case postale 56 . CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 41 22 749 09 47 E-mail [email protected] Web www.iso.org Published in Switzerland yemainagazainandardizato @ISO2004-All rights reserved mittedwithoutlicense from IHS Not for Resale ISO 13695:2004(E) Contents Page Foreword. Introduction 1 Scope 2 Normative references 3 Terms and definitions 4 Symbolsandabbreviatedterms. 8 5 Traceability Measurement of wavelength and bandwidth 6.1 General. 6.2 Types of measurements . 10 6.3 Equipment selection. 11 6.4 Measurements in air . 11 6.5 Measurements at low resolution 12 6.6 Measurement at higher resolution . 14 7 Measurement of wavelength stability .. 17 7.1 Dependence of the wavelength on operating conditions .. 17 7.2 Wavelength stability of a single frequency laser 17 8 Test report. ..18 Annex A (informative) Refractive index of air.. ..20 Annex B (informative) Criteria for the choice of a grating monochromator and its accessories Calibration.... 21 Annex C (informative) Criteria for the choice of a Fabry-Perot interferometer... ..24 Bibliography 25 Copyrght International Organizaionorstandardizaoghtsreserved ili Not for Resale ISO 13695:2004(E) Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies (isO member bodies). The work of preparing International Standards is normally carried out through IsO International Standards are drafted in accordance with the rules given in the ISO/lEC Directives, Part 2. adopted by the technical committees are circulated to the member bodies for voting. Publication as an Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. IsO shall not be held responsible for identifying any or all such patent rights. ISO 13695 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9, Electro-opticalsystems. ational Organization for Standardizatior @ISo2004-All rightsreserved ISO 13695:2004(E) Introduction The spectral characteristics of a laser, such as its peak wavelength or spectral linewidth, are important for potential applications. Examples are the specific application requirements of interferometry and lithography. types. The acceptable level of uncertainty in the measurement of wavelength will vary according to the intended three accuracy classes. To standardize reporting of spectral characteristics measurement results, a report example is also included. V Not for Resale yhemainaanaioSandardizato orneworkingmitedwithout