IEC IEEE IEC/IEEE62659 Edition1.02015-09 INTERNATIONAL STANDARD Nanomanufacturing-Large scale manufacturingfornanoelectronics IEC/IEEE62659:2015-09(en THISPUBLICATIONISCOPYRIGHTPROTECTED Copyright2015IEC,Geneva,Switzerland Copyright@2015IEEE All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing being secured.Requests for permission to reproduce should be addressed to either IEC at the address below or IEC's memberNationalCommittee inthecountryoftherequesterorfromIEEE IEC Central Office Institute of Electrical and Electronics Engineers, Inc. 3, rue de Varembe 3ParkAvenue CH-1211Geneva 20 NewYork, NY10016-5997 United Statesof America Switzerland Tel.: +41 22 919 02 11 [email protected] Fax:+41229190300 www.ieee.org [email protected] www.iec.ch AbouttheIEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes InternationalStandardsforall electrical,electronicandrelatedtechnologies. AbouttheIEEE IEEE is the world's largest professional association dedicated to advancing technological innovation and excellence for the benefit of humanity. IEEE and its members inspire a global community through its highly cited publications, conferences, technology standards, and professional and educational activities. AboutIEC/IEEEpublications that you have the latest edition, a corrigendum or an amendment might have been published. IEc Catalogue-webstore.iec.ch/catalogue Electropedia -www.electropedia.org The stand-alone application for consulting the entire The world's leading online dictionary of electronic and bibliographical information on IEC International Standards, electricalterms containing morethan30 000 terms and Technical Specifications, Technical Reports and other definitions in English and French, with equivalent terms in documents. Available for PC, Mac OS, Android Tablets 15 additional languages. Also known as the International and iPad. Electrotechnical Vocabulary (IEV) online. IEC publications search-www.iec.ch/searchpub IEC Glossary-std.iec.ch/glossary The advanced searchenables tofind IEC publications bya More than 60 000 electrotechnical terminology entries in variety of criteria (reference number, text, technical English and French extracted from the Terms and committee,..).It also givesinformation on projects, Definitions clause of IEC publications issued since 2002. replaced and withdrawnpublications. Some entries have been collected from earlierpublications of IEC TC 37, 77, 86 and CISPR. IECJustPublished-webstore.iec.ch/justpublished Stay up to date on all new IEC publications. Just Published IECCustomerServiceCentre-webstore.iec.ch/csc details all new publications released. Available online and If you wish to give us your feedback on this publication or also once a month by email. need further assistance, please contact the Customer ServiceCentre:[email protected]. IEC IEEE IEC/IEEE62659 Edition 1.02015-09 INTERNATIONAL STANDARD Nanomanufacturing-Largescalemanufacturing for nanoelectronics INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 07.030; 25.020 ISBN978-2-8322-2915-6 Warning!Make sure that you obtained this publication from an authorized distributor.