IEC IEC62047-25 Edition1.02016-08 INTERNATIONAL STANDARD NORME INTERNATIONALE nside Semiconductordevices-Micro-electromechanicaldevices Part25:SiliconbasedMEMsfabricationtechnology-Measurementmethodof pull-press and shearingstrength of micro bondingarea Dispositifsasemiconducteurs-Dispositifsmicroelectromecaniques Partie25:TechnologiedefabricationdeMEMSabasedesilicium-Methodede mesuredela resistancealatraction-compressionetaucisaillementd'une microzonedebrasure IEC 62047-252016-08(en-fr) THISPUBLICATIONISCOPYRIGHT PROTECTED Copyright2016IEC,Geneva,Switzerland or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC your local iEC member National Committee for further information. ni utilise sous quelque forme que ce soit et par aucun procede, electronique ou mecanique, y compris la photocopie et les microfilms, sans I'accord crit de IIEC ou du Comite national de I'lEC du pays du demandeur. Si vous avez des questions sur le copyright de riEC ou si vous desirez obtenir des droits supplementaires sur cette publication, utilisez les coordonnées ci-apres ou contactez le Comite national de I'lEC de votre pays de residence. IEC Central Office Tel.: +41 22 919 02 11 3, rue de Varembe Fax: +41 22 919 03 00 CH-1211 Geneva 20 [email protected] Switzerland www.iec.ch About the IEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for all electrical, electronic and related technolog ies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Ple ase make sure that you have the IEC Catalogue -webstorejec.ch/catalogue Electropedia-www.electropedia.org The stand-alone application forconsulting theentire The world's leading online dictionary of electronic and bibliographical information on IEc International Standards, electrical terms containing 20 000 terms and definitions in Technical Specifications, Technical Reports and other English and French, with equivalent terms in 15 additional documents. Available for PC, Mac OS, Android Tablets and languages. Also known as the International Electrotechnical iP ad. Vocabulary (IEV) online. IEC publications search -www.lec.ch/searchpub IEC Glossary - std.lec.ch/glossary The advanced search enables to find IEC publications by a 65 000 electrotechnical terminology entries in English and variety. of criteria (reference number, text, technical French extracted from the Terms and Definitions clause of committee,..). It also gives information on projects, replaced IEC publications issued since 2002. Some entries have been and withdrawn publications collected from earlier publicafions of IEC TC 37, 77, 86 and CISPR. IEc Just Published -webstore.iec.ch/justpublished Stay up to date on all new IEC publications. Just Published IEcCustomerServiceCentre-webstore.iec.ch/csc If you wish to give us your feedback on this publication or details all new publications released. Available online and also once a month by email. need further assistance, please contact the Customer Service Centre:[email protected]. A propos de I'IEC La Commission Ele ctrotechnique Internationale (IEC) est la premiere organisation mondiale qui elabore et publie des A propos des publications IEC Le contenu technique des publications IEc est constamment revu. Veuillez vous assurer que vous possedez I'édition la plus recente, un corrig endum ou amendement peut avoir ete publie. CataloguelEC-webstorejec.ch/catalogue Electropedia-www.electropedia.org Application autonome pour consulter tous les renseignements Le premier dictionnaire en ligne de termes électroniques et bibliographiques Normes sur les internationales, Specifications techniques, Rapports techniques_et autres et en frangais, ainsi que les termes equivalents dans 15 documents de rIEC. Dis