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IEC 62047-29 2017 Semiconductor devices - Micro-electromechanical devices - Part 29 Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
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IEC 62047-29 2017 Semiconductor devices - Micro-electromechanical devices - Part 29 Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
