ICS 31.030 CCS Q 50/59 团体 标准 碳化硅单晶生长用等静压石墨构件纯度测 定方法 辉光放电质谱法 Test method for purity of iso -static graphite components used in the growth of silicon carbide single crystals -Glow discharge mass spectrometry 2025 - 04 - 23发布 2025 - 04 - 23实施 T/CASAS 036—2025 第三代半导体产业技术创新战略联盟 发布 全国团体标准信息平台 全国团体标准信息平台 T/CASAS 036 —2025 I 目次 前言 ................................ ................................ ................................ ................................ ................................ ...... II 引言 ................................ ................................ ................................ ................................ ................................ .... III 1 范围 ................................ ................................ ................................ ................................ ................................ .. 1 2 规范性引用文件 ................................ ................................ ................................ ................................ .............. 1 3 术语和定义 ................................ ................................ ................................ ................................ ...................... 1 4 试验原理 ................................ ................................ ................................ ................................ .......................... 1 5 试验环境 ................................ ................................ ................................ ................................ .......................... 2 6 仪器设备 ................................ ................................ ................................ ................................ .......................... 2 辉光放电质谱仪 ................................ ................................ ................................ ................................ ....... 2 制样设备 ................................ ................................ ................................ ................................ ................... 2 7 试剂与材料 ................................ ................................ ................................ ................................ ...................... 2 8 试样 ................................ ................................ ................................ ................................ ................................ .. 2 取样 ................................ ................................ ................................ ................................ ........................... 3 试样制备 ................................ ................................ ................................ ................................ ................... 3 9 试验步骤 ................................ ................................ ................................ ................................ .......................... 3 仪器准备 ................................ ................................ ................................ ................................ ................... 3 9.1.1 质量校正 ................................ ................................ ................................ ................................ ............ 3 9.1.2 检测器交叉校正 ................................ ................................ ................................ ................................ 3 试样测试 ................................ ................................ ................................ ................................ ................... 3 10 试验结果 ................................ ................................ ................................ ................................ ........................ 3 11 试验报告 ................................ ................................ ................................ ................................ ........................ 4 附录 A （资料性） 元素同位素及分辨率 ................................ ................................ ............................